AVIZA Technology, Inc.

APCVD Furnaces

Aviza Technology's APCVD systems provide low cost of ownership, high film quality and process versatility. Aviza offers the following APCVD system platforms:

Production-proven performance

* WJ-999 Series for TEOS or Hydride applications.

* WJ-1000/1500 Series for TEOS or Hydride applications.